Eagle Harbor Technologies, Inc. (EHT)

The Nanosecond Pulse Generator (NSP) series by Eagle Harbor Technologies (EHT) is available in either low or high power variants to easily drive capacitive loads, like dielectric barrier discharges and other low-temperature plasmas.

Electroporation is the application of an electric field that causes a brief breakdown of cell membranes to allow molecules to enter the cell. A primary biomedical application of electroporation is the reintroduction of engineered T-cells for immunotherapy.

The EHT Bipolar Microsecond Pulser (BMP) allows researchers and businesses to ablate cancerous cells, rapidly develop new cancer therapies and develop vaccines and other treatments. The BMP produces high-voltage square pulses with fast rise times.

This Integrated Power Module (IPM) by Eagle Harbor Technologies (EHT) simplifies high-current, high frequency, solid-state switching. The IPM features a solid-state switch, fiber optically isolated gate drive, freewheeling diodes, fast capacitors, snubbers, and crowbar diodes. It is housed in a 3U chassis.

EHT pulse generators are designed to provide precision control over the output waveform to enable process optimization. These units have an isolated/floating output and can be biased with respect to the load or grounded.

The EHT Switching Power Amplifier (SPA) is a IGBT or SiC MOSFET-based full bridge designed to drive resisitive, inductive, and resonant loads. The EHT SPA includes independent, fiber-optically isolated gates for each leg of the full bridge allowing the user to control which bridge legs are in forward conduction vs freewheeling.

The EHT Pulse Amplifier offers a simple way to generate high voltage pulses up to 800 V. This unit includes four independently triggered channels and features a dual voltage isolated internal supply that can rapidly actuate valves, and then hold them open continuously. 

The FT-1 is a compact BNC-to-fiber optic transmitter with single channel. This fiber interface can be used for typical laboratory control needs.

The FT-16 is a fiber optic transmitter in 1U rack mount format. 16 channels, each operated individually or synchronously. It can be used for typical laboratory control requirements. The FT-16 is ideal for noise-immune triggering and control via the fiber transmitters and 50 Ω BNC outputs.

The FR-1 is a compact single channel fiber receiver, the reverse of the FT-1: fibre-to-BNC. This fiber interface can be used for typical laboratory control needs.

The FR-8 is a fiber optic receiver with eight channels and comes in 1U rack mount. All of the channels can be operated synchronously, or individually. It has high-speed outputs 50 Ω TTL and high current relay outputs Form C.

With 16 fiber optic inputs, the ILC-16 is a 1U rack mount interlock controller. It is intended for equipment and laboratory safety. Inputs must be active in order for the output to be active, selectable by the user.

The fiber optic isolation unit FTR-Custom can be constructed under customer's requirements and specification. It is a quick and cost effective way to build the design through customer’s prototype.

The ISP-16 contains 16 differential independent integrator channels, which are optimized to run for times less than 10 seconds. The period of integration can range from sub microsecond and is optimized for periods up to 10 s. It is controlled by an external gate.

The ILP-8 contains 8 differential independent integrator channels, which are optimized to run for times longer than 1 second. The period of integration can range from 1 s to continuous and is controlled by an external gate. Continuous operation is stable while gated on.

Using our core IGBT-based switching technology, Eagle Harbor Technologies develops unique power supplies for complicated applications. Custom supplies typically include fiber optic gate control, high voltage isolation, and precision timing. The waveform generated is specified by the customer and intended for a given application.

The Eagle Harbor Technologies (EHT) Charge / Dump Control is a standardized system that automates the charging, dumping, and grounding of high voltage systems. It can be operated in both local and remote mode.

The Eagle Harbor Technologies (EHT) Rapid Capacitor Charger was designed for a specific customer application to charge quickly up to 4 nF capacitors in 100 – 300 ns (depending on capacitance).

Using our core IGBT-based switching technology, EHT custom power supplies feature fibre optic gate control, high voltage isolation, and precision timing. They can generate a customer specified waveform, specific to your application.

EHT inductive adders allow high voltage pulses into 50 Ohm loads with rise times on the nanosecond-scale. All drive components are ground-referenced. This eliminates switching jitter problems, and floating gate drive complexities. Agility of pw (pulse width) and prf (pulse repetition frequency). The output pulses are defined by input pulses to gates.

EHT has developed a solution for driving a 40 kA current yet maintaining a flat top for 10 ms in an electromagnetic coil. In order to minimize the ripple on the coil, the circuit pulse width modulates at 100 kHz. Each integrated power module (IPM) was tested at 2.5 kA/IPM.

Spartan 20 kW, 175 A, and 80-600 kHz Unipolar Pulse Generator. Matching network not required – reduces complexity. Improved ion energy distribution control leads to improved etch quality. Fast pulse rise time optimizes wafer on-time (time wafer spends at nonzero voltages). Retrofit older processing tools to upgrade capabilities. 

Hoplite™ 5 kW, 0-18 kV, 130 A und 80-600 kHz Unipolarer Impulsgenerator. Matching network not required – reduces complexity; Improved ion energy distribution control leads to improved etch quality; Fast pulse rise time optimizes wafer on-time (time wafer spends at nonzero voltages).

Perseus 20 kW, 600 kHz, 110 A, and 0-16 kV Bipolar Pulse Generator. Programmable ion energy distribution leads to higher etch performance. Manufacture high-aspect-ratio structures and smaller critical dimensions. Real-time wafer voltage and IED calculated from internal measurements of bias voltage and current. 

Mid-Frequency Matchless RF 100 kW, 100 kHz - 1 MHz, 3 kA, and 25 kV Generator.  EHT Semi matchless RF Generators bring new advantages to the semiconductor industry. Higher voltage compared with existing RF generators. Higher power levels can translate to faster etching.

High-Frequency 20 kW, 15 MHz, and 0-10 kV Matchless bipolar RF Generator. EHT Semi matchless RF Generators bring new advantages to the semiconductor industry. Higher voltage compared with existing RF generators. Higher power levels can translate to faster etching.